The structure of a multi -layered integrated circuit is determined by (a) Removing successive layers of the circuit. (b) The intensity of backscattered or secondary electrons is detected by first or second detector. (c) Surface of the integrated circuit is a flat layer of semiconductor substrate material having implanted doped areas, the surface is covered with a metallisation layer providing a Schottky barrier. (d) All 3 of above.
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All the above
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