Advantages : 1. Batch fabrication and hence reduced cost. 2. Reduced size and reduced power ( due to pin size and reduced package volume) 3. High precision and resolution. 4. Reduced parasitic due to interconnecting devices.
Disadvantages : 1. Very small to trace out 2. Due to small size, it is physically impossible for MEMS to transfer any significant power. 3. They are made from poly-si , a brittle material , they cannot be loaded with large forces because brittle materials can be fractured easily under high stress.